Surface-treating support member and method using the same

ABSTRACT

A surface-treating support member for supporting a plurality of works, including an upper cage and a lower cage including a plurality of compartments, so that the cages are openable and closeable in a lengthwise direction. A process for surface-treating a plurality of works rotates the works about their axes using the support member.

This application is a divisional of 09/407,304 filed on Sep. 29, 1999,now U.S. Pat. No. 6,280,792.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a surface treating process, and inparticular, a surface treating process for forming a deposited film of ametal such as aluminum, zinc and tin, or a metal nitride such astitanium nitride on the surface of a sintered product such as, forexample, a rare earth metal-based magnet liable to be oxidized, and thelike, thereby ensuring that the sintered product such as the rare earthmetal-based magnet has an oxidation resistance.

In more particular, the present invention relates to a surface treatingprocess capable of surface-treating a large number of works collectivelyand uniformly such as a sintered product, e.g., a rare earth metal-basedmagnet having a shape having an inside diameter portion such as aring-like shape and the like, and to a surface-treating support member,a surface treating holder and a surface treating apparatus which aresuitable for use in such process.

2. Description of the Related Art

For example, in a conventional surface treating process for a rare earthmetal-based magnet, a vacuum vapor-deposition apparatus 120 as shown inFIG. 11 was used to carry out a vapor deposition of aluminum. In FIG.11, reference character 121 designates a vacuum treating chamber whichcan be maintained at a predetermined degree of vacuum through a vacuumpump 122. In the vacuum treating chamber 121, aluminum 123, which is anevaporation source, is heated within an evaporation source holder 124 bya heater 125. A rare earth metal-based magnet article 130 as a work isaccommodated in a cage-like container 126, and the vapor deposition ofaluminum is carried out, while rotating the container 126, therebyuniformly depositing aluminum on the rare earth metal-based magnetarticle 130 as the work.

In the above conventional surface treating process, however, thesubstantially uniform vapor-deposition can be performed certainly.However, because the works are piled one on another within the cage-likecontainer, it cannot be avoided that some deposition nonuniformity isproduced. Therefore, it has been desired to propose a surface treatingprocess by which a further uniform surface treatment can be performed.Many of rare earth metal-based magnet articles such as Nd—Fe—B basedmagnet articles, for example, resulting from the processing treatment,are rectangular parallelepiped, hard and moreover, have sharp corners.For this reason, the following problem is arisen: The corners collidewith one another during the vapor deposition treatment, whereby thedeposited film on the surface is peeled off and in a severe case, thecorners of a product are chipped, resulting in a poor yield.Particularly, in a case of a large-sized article, there is a problemthat the weight is large, and the collision energy is large, resultingin an extremely reduced yield. In a case of a work having an insidediameter portion and having a shape such as a ring-like shape and thelike, there is a disadvantage that the inside diameter side of the workis occluded by the other work and for this reason, the uniform surfacetreatment of the inside diameter side cannot be achieved successfully.

SUMMARY OF THE INVENTION

Accordingly, it is an object of the present invention to provide asurface treating process, wherein the problems and disadvantagesassociated with the conventional process can be overcome, and even aplurality of works each having an inside diameter portion and having ashape such as a ring-like shape and the like can be uniformlysurface-treated collectively.

As a result of zealous reviews, the present inventors have found thatthe surface treatment of works such as a vapor deposition meeting theabove requirement can be carried out in a state in which the works hasbeen spaced apart from one another, while rotating the works about theiraxes, or rotating the works about a rotational axis, or rotating theworks about the rotational axis and about their axes.

To achieve the above object, according to a first aspect and feature ofthe present invention, there is provided a surface-treating supportmember for supporting a plurality of works, comprising an upper cage anda lower cage including a large number of compartments, so that the cagesare openable and closable in a lengthwise direction.

With the above feature, the surface-treating support member is comprisedof the upper and lower cages including the large number of compartments,so that the cages are openable and closable in the lengthwise direction.Therefore, the works can be accommodated into the cage-like compartmentsat distances and removed from the cage-like compartments by opening andclosing the upper and lower cages.

The shape, mesh size and the like of each cage may be selected properly,so that clearances can be formed at a size enough to ensure that asurface-treating material can reach works sufficiently and uniformly incorrespondence to the size and shape of the work.

According to a second aspect and feature of the present invention, thereis provided a surface-treating support member for supporting a pluralityof works each having an inside diameter portion, comprising plate-likeelements openably and closably foldable in a lengthwise direction, theplate-like elements being capable of defining a plurality of narrowsections each having a length corresponding to the inside diameter ofthe work in opened states.

According to a third aspect and feature of the present invention, inaddition to the second feature, the plate-like elements are openably andclosably foldable by a hinge.

With the above features, the surface-treating support member iscomprised of plate-like elements openably and closably foldable in alengthwise direction, so that the plurality of narrow sections eachhaving a length corresponding to the inside diameter of the work can bedefined in the opened state. Therefore, works can be set respectively inthe narrow sections in the folded states of the plate-like elements, andthen supported in spaced-apart states in the narrow sections by foldingup the plate-like elements. After the surface treatment, the works canbe easily removed from the support member by folding the plate-likeelements again.

Particularly, by ensuring that the plate-like elements can be openablyand closably folded by the hinge, it is easy to mount and remove theworks to and from the support member.

The shape, size and the like of each of the narrow sections may beselected, so that the works can be maintained in the spaced-apart statesin correspondence to the size and shape of the work.

According to a fourth aspect and feature of the present invention, thereis provided a surface treating holder comprising a wire which is coiledat distances in such a manner that it is formed as a spring-like tubularstructure having spiral-line faces at opposite ends thereof, so thatworks can be accommodated in the tubular structure.

According to a fifth aspect and feature of the present invention, inaddition to the fourth feature, the tubular structure is a cylindricalstructure.

According to a sixth aspect and feature of the present invention, inaddition to the fourth feature, an entanglement preventing spring iswound around that portion of the wire which forms the side face of thetubular structure.

According to a seventh aspect and feature of the present invention, inaddition to the fourth feature, the wire is closely wound in thevicinity of opposite ends of a side face of the tubular structure.

According to an eight aspect and feature of the present invention, inaddition to the fourth feature, the central portion of the wire isclosely wound at locations corresponding to the spiral-line faces of thetubular structure.

According to a ninth aspect and feature of the present invention, inaddition to the fourth feature, the wire is formed of a stainless steel.

In the surface-treating holder, the wire is coiled at distances in sucha manner that it is formed as the spring-like tubular structure havingspiral-line faces at opposite ends thereof, so that the works can beaccommodated in the tubular structure. Therefore, the uniform surfacetreatment such as vapor deposition of aluminum can be carried out fromthe clearances defined by the wire. In addition, even when the holderscollide with one another, the works within the holders cannot collidewith one another. Moreover, no large shock cannot be applied to the workwithin the holder by the aid of a spring property possessed by theholder and hence, the peeling-off of a treated surface, the chipping ofa product and the like cannot be produced. The work can be placed intoand removed from the holder through the clearances defined by the wireby utilizing the spring property and thus, special inlet and outlet arenot required.

The diameter, number of turns and pitch of turns of the wire may beselected properly, taking account of the formation of the clearancehaving a size enough to enable the appropriate spring property and thefact that the surface treating material can reach the work sufficientlyand uniformly.

If the holder is tubular, the shape of the holder is particularly notlimited, and the holder may be elliptical. However, if it is taken intoconsideration that the holder can be easily rotated, and that thematerial is deposited uniformly, it is preferable that the holder iscylindrical.

In addition, by winding the entanglement preventing spring around thatportion of the wire which forms the side face of the tubular structure,the wires forming the holders can be prevented from entering a clearancedefined between both of the wires, whereby the entanglement of the wiresforming the holders with one another is prevented.

The entering of the wires forming the holder into the clearance definedbetween both of the wires can be inhibited likewise even by closelycoiling the wire in the vicinity of the opposite ends of the side faceof the tubular structure, or by closely coiling the central portion ofthe wire at the opposite spiral-line faces of the tube, whereby theentanglement of the wires forming the holders with one another isprevented. This ensures that the uniform surface treatment such as vapordeposition of aluminum is feasible.

By forming the wire from a stainless steel, for example, aluminum or thelike deposited on the wire can be washed off by an acid. In addition,the spring property is not damaged even by the vapor deposition carriedout at a high temperature, unlike iron.

In this way, if the surface treatment such as vapor deposition ofaluminum is carried out in a state in which a work comprising a rareearth metal-based magnet has been accommodated in the surface treatingholder having the above-described arrangement, the uniform surfacetreatment as ever can be achieved through the clearances defined by thewire, and moreover, the peeling-off of the treated surface, the chippingof a product and the like cannot be produced, leading to an excellentyield.

According to a tenth aspect and feature of the present invention, thereis provided a process for surface-treating a plurality of works,comprising the step of surface-treating the works in a treating chamber,while rotating the works about their axes in spaced-apart states.

According to an eleventh aspect and feature of the present invention, inaddition to the tenth feature, the surface treatment is a vapordeposition on a sintered article.

According to a twelfth aspect and feature of the present invention, inaddition to the tenth feature, the rotation of the works about theiraxes is conducted with the works supported by a support member rotatedabout its axes.

According to a thirteenth aspect and feature of the present invention,in addition to the twelfth feature, the surface treatment is a vapordeposition on a sintered article.

According to a fourteenth aspect and feature of the present invention,in addition to the twelfth feature, a support member according to thefirst feature is used.

According to a fifteenth aspect and feature of the present invention, inaddition to the fourteenth feature, the surface treatment is a vapordeposition on a sintered article.

According to a sixteenth aspect and feature of the present invention, inaddition to the twelfth feature, a support member according to thesecond feature is used.

According to a seventeenth aspect and feature of the present invention,in addition to the sixteenth feature, the surface treatment is a vapordeposition on a sintered article.

According to an eighteenth aspect and feature of the present invention,in addition to the tenth feature, each of the works is accommodated incorresponding one of holders according to the fourth feature, and theholders are rotated about their axes within a porous cage-like rotatablemember.

According to a nineteenth aspect and feature of the present invention,in addition to the eighteenth feature, the surface treatment is a vapordeposition on a sintered article.

According to a twentieth aspect and feature of the present invention,there is provided a process for surface-treating a plurality of works,comprising the step of surface-treating the works, while rotating themabout a rotational axis in spaced-apart states.

According to a twenty first aspect and feature of the present invention,in addition to the twentieth feature, the surface treatment is a vapordeposition on a sintered article.

According to a twenty second aspect and feature of the presentinvention, in addition to the twentieth feature, the rotation of theworks about their axes is carried out with the works supported by asupport member rotated about a rotational axis.

According to a twenty third aspect and feature of the present invention,in addition to the twenty second feature, the surface treatment is avapor deposition on a sintered article.

According to a twenty fourth aspect and feature of the presentinvention, in addition to the twenty second feature, a support memberaccording to the first feature is used.

According to a twenty fifth aspect and feature of the present invention,in addition to the twenty fourth feature, the surface treatment is avapor deposition on a sintered article.

According to a twenty sixth aspect and feature of the present invention,in addition to the twenty second feature, a support member according tothe second feature is used.

According to a twenty seventh aspect and feature of the presentinvention, in addition to the twenty sixth feature, the surfacetreatment is a vapor deposition on a sintered article.

According to a twenty eighth aspect and feature of the presentinvention, there is provided a process for surface-treating a pluralityof works, comprising the step of surface-treating the works, whilerotating them about their axes and about a rotational axis inspaced-apart states.

According to a twenty ninth aspect and feature of the present invention,in addition to the twenty eighth feature, the surface treatment is avapor deposition on a sintered article.

According to a thirtieth aspect and feature of the present invention, inaddition to the twenty eighth feature, the rotation of the works aboutthe rotational axis conducted while being rotated about their axes iscarried out with the works supported by a support member rotated about arotational axis and about its axis.

According to a thirty first aspect and feature of the present invention,in addition to the thirtieth feature, the surface treatment is a vapordeposition on a sintered article.

According to a thirty second aspect and feature of the presentinvention, in addition to the thirtieth feature, a support memberaccording to the first feature is used.

According to a thirty third aspect and feature of the present invention,in addition to the thirty second feature, the surface treatment is avapor deposition on a sintered article.

According to a thirty fourth aspect and feature of the presentinvention, in addition to the thirtieth feature, a support memberaccording to the second feature is used.

According to a thirty fifth aspect and feature of the present invention,in addition to the thirty fourth feature, the surface treatment is avapor deposition on a sintered article.

In the above process for surface-treating the plurality of works, thesurface treatment of the works is carried out in the treating chamber inspaced-apart states, while rotating the works about their axes, orrotating the works about the rotational axis, or rotating the worksabout their axes and about the rotational axis. Therefore, the entiresurfaces of the works can be treated uniformly and simultaneously.

Thus, by such uniform surface treatment of the works in the spaced-apartstates, a film of a soft metal such as aluminum, tin and zinc or a hardmetal nitride such as titanium nitride can be deposited uniformly evenon a hard and brittle sintered article.

The rotation of the works about their axes, or about the rotationalaxis, or about their axes and about the rotational axis can be reliablyachieved by supporting the works by the support member rotated about itsaxis, or about the rotational axis, or about its axis and about therotational axis.

In this case, the works can be rotated about their axes, or about therotational axis, or about their axes and about the rotational axis inthe spaced-apart states by use of the surface-treating support memberaccording to the above-described feature of the present invention. Whenthe surface-treating support member is used which is comprised of theupper and lower cages including the cage-like compartments, so that thecages are openable and closable in the lengthwise direction, the workscan be treated, irrespective of the shape of the works and particularly,even if they are large-sized.

In addition, by using the surface-treating support member which iscomprised of the plate-like support elements openably and closablyfoldable in the lengthwise direction, so that the plurality of narrowsections each having a length corresponding to an inside diameter of awork having an inner diameter portion are defined in the opened statesof the plate-like elements, the works having the inside diameter portionand having a disk-like shape or the like can be rotated about theiraxes, or about the rotational axis, or about their axes and about therotational axis, while being reliably maintained in the spaced-apartstates. Particularly, when the works are supported at the insidediameter in the above manner, the works can be orientated vertically inthe lengthwise direction with respect to the treating material sourcesuch as a vapor deposition source. Moreover, the reaching of thetreating material to the surfaces of the works cannot be blocked, exceptfor the inside diameter-supported points of the works, whereby a veryefficient surface treatment can be achieved. Therefore, a vacuumdeposition in a short time is feasible, and the surface treatment can befinished before rising of the temperature. The surface treatment of, forexample, an Nd—Fe—B rare earth metal-based sintered magnet article canbe achieved in one run with a very good efficiency at a temperature of400° C. or less at which the magnetic property is not degraded. Theinside diameter-supporting is by point contact, and the point contactsites are moved properly, whereby the entire inside diameter issurface-treated.

Moreover, in this case, if the vapor deposition is carried out in astate in which the negative pole has been connected to the supportmember; the works have been placed in their insulated states, and thevapor deposition source has been connected to a positive pole, theuniform surface treatment can be performed for the inside diameter side.It is convenient that the negative pole is connectable to the worksthrough the means for rotating the works about their axes, because thenegative pole can be connected to the works, when a surface cleaningtreatment is to be conducted with argon gas.

The rotation of the works about their axes can be also performed by amethod other than use of the support member, for example, byaccommodating the works in the surface-treating holders and rotating theholders about their axes within a porous cage-like rotatable member.

The surface treatment is applicable to the formation of a film by avapor deposition process and is suitable for depositing any of a metal,a non-metal inorganic substance, an organic compound and the like. Thesurface treatment is applicable to a vacuum deposition process, an ionsputtering process, an ion plating process, a vapor depositionpolymerization and the like.

According to a thirty sixth aspect and feature of the present invention,there is provided a surface treating apparatus, comprising a treatingmaterial source provided within a treating chamber, so that a treatingmaterial released from the treating material source is delivered toreach works for a surface treatment, and a means for rotating a supportmember supporting the works about its axis.

According to a thirty seventh aspect and feature of the presentinvention, in addition to the thirty sixth feature, the surface treatingapparatus is a vapor deposition apparatus.

According to a thirty eighth aspect and feature of the presentinvention, there is provided a surface treating apparatus, comprising atreating material source provided within a treating chamber, so that atreating material released from the treating material source isdelivered to reach works for a surface treatment, and a means forrotating a support member supporting the works about a rotational axis.

According to a thirty ninth aspect and feature of the present invention,in addition to the thirty eighth feature, the surface treating apparatusis a vapor deposition apparatus.

According to a fortieth aspect and feature of the present invention,there is provided a surface treating apparatus, comprising a treatingmaterial source provided with in a treating chamber, so that a treatingmaterial released from the treating material source is delivered toreach works for a surface treatment, and a means for rotating a supportmember supporting the works about its axis and about a rotational axis.

According to a forty first aspect and feature of the present invention,in addition to the fortieth feature, the surface treating apparatus is avapor deposition apparatus.

According to a forty second aspect and feature of the present invention,in addition to the fortieth feature, the apparatus further includes atleast two rotary plates, on which receiving elements for support membersfor supporting the works are disposed in a circumferential direction, sothat the support members can be supported between the at least tworotary plates through the receiving elements, whereby the supportmembers can be rotated about their axes by the rotation of the receivingelements and rotated about the rotational axis by the rotation of therotary plates.

According to a forty third aspect and feature of the present invention,in addition to the forty second feature, the surface treating apparatusis a vapor deposition apparatus.

According to a forty fourth aspect and feature of the present invention,in addition to the fortieth feature, the apparatus further includes ameans for transmitting a driving force provided by a driving shaft forrotating the support member about the rotational axis to the supportmember, as a driving force for rotating the support member about itsaxis.

According to a forty fifth aspect and feature of the present invention,in addition to the forty fourth feature, the surface treating apparatusis a vapor deposition apparatus.

The above-described surface treating apparatus includes the means forrotating the support member for supporting the works about its axis, themeans for rotating the support member for supporting the works about therotational axis, or the means rotating the support member for supportingthe works about its axis and about the rotational axis. Therefore, bytransporting the surface-treating support member into the treatingchamber to set it in the treating chamber, the plurality of works can besurface-treated simultaneously and uniformly, while being rotated abouttheir axes, or about the rotational axis, or about their axes and aboutthe rotational axis in spaced-apart states.

In the surface treating apparatus, the support members can be supportedthrough the receiving elements between the at least two rotary plates onwhich the receiving elements for supporting the works are disposed inthe circumferential direction. In addition, in the surface treatingapparatus, the support members can be rotated about their axes by therotation of the receiving elements and rotated about the rotational axisby the rotation of the rotary plates. Therefore, the plurality of workscan be surface-treated simply utilizing the conventional vapordeposition apparatus, while being rotated about their axes, or about therotational axis, or about their axes and about the rotational axis inthe spaced-apart states.

The surface treating apparatus is applicable to the formation of a filmby a vapor-phase growth process, and more particularly, examples of suchapparatus are a vacuum vapor deposition apparatus, an ion sputteringapparatus, an ion plating apparatus, and a vapor deposition polymerizingapparatus.

The above and other objects, features and advantages of the inventionwill become apparent from the following description of the preferredembodiment taken in conjunction with the accompanying drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a perspective view of an embodiment of a surface-treatingsupport member according to the present invention;

FIGS. 2A and 2B are front and side views of the embodiment of asurface-treating support member according to the present inventionduring mounting and removal of works;

FIGS. 3A and 3B are front and side views of the embodiment of thesurface-treating support member according to the present inventionduring supporting of works;

FIG. 4 is a front view showing the embodiment in a state in which it hasbeen mounted to a rotary unit;

FIG. 5 is a front view of an embodiment of a surface treating holderaccording to the present invention;

FIG. 6 is a side view of the embodiment shown in FIG. 5;

FIG. 7 is a front view of another embodiment of a surface treatingholder according to the present invention;

FIG. 8 is a front view of an embodiment of a surface treating apparatusaccording to the present invention;

FIG. 9 is a perspective view of a rotary unit of the apparatus shown inFIG. 8;

FIG. 10 is an enlarged perspective view of a disk unit for rotatingworks about their axes;

FIG. 11 is a view of a conventional surface treating apparatus.

DESCRIPTION OF THE PREFERRED EMBODIMENTS

The present invention will now be described by way of embodiments withreference to the accompanying drawings.

I. Embodiment of Surface-treating Support Member Comprised of Upper andLower Openable/Closable Cages

FIG. 1 shows an embodiment of a surface-treating support memberaccording to the present invention, which is comprised of upper andlower cages each including a large number of cage-like compartments, sothat the cages are openable and closable in a lengthwise direction.

The upper and lower cages 1 a and 1 b constituting the surface-treatingsupport member 10 are formed into symmetrical structures openable andclosable through a hinge 2, and each formed of a net made of a stainlesssteel and having a mesh of 5 mm and a thickness of 1 mm. In theillustrated embodiment, fifteen cage-like compartments 3 are defined ina partitioned manner, so that a work Wa can be accommodated in each ofthe cage-like compartments 3. In FIG. 1, reference character 4designates a connecting piece for connecting the surface-treatingsupport member 10 to a receiving element which will be describedhereinafter. The connecting piece 4 is capable of being fastened to thereceiving element by a screw threadedly inserted into a bore 5. When thesurface treatment is conducted, the upper and lower cages 1 a and 1 bare fastened to each other by a clip or clips (not shown)

II. Embodiment of Surface-treating Support Member Comprised ofOpenably/Closably Foldable Plate-Like Elements

The surface-treating support member of this embodiment is suitable forsupporting a plurality of works each having an inside diameter portion.

In FIGS. 2 and 3 showing an embodiment of a surface-treating supportmember according to the present invention, the support member designatedby 20 in FIGS. 2 and 3 is comprised of plate-like elementsopenably-closably foldable in a lengthwise direction. The plate-likeelements are designed, so that a plurality of narrow sections eachhaving a length corresponding to a diameter of a work having an insidediameter portion can be defined in opened states of the plate-likeelements.

A surface-treating support member 20 of this embodiment is suitable forsupporting a plurality of works each having an inside diameter portion.

Two plate-like elements 6, 6 formed from a plate material made of astainless steel are formed into openable and closable symmetrical platesand are normally maintained in their folded state under the action of aresilient force of a spring hinge 7.

Grooves 8 are defined at equal distances in each of the plate-likeelements 6 along its outer side edge, so that a plurality of narrowsections 9 each having a length corresponding to an inside diameter L ofa work Wa having an inside diameter portion are defined by the opposedgrooves 8 by opening the plate-like elements 6, 6.

In FIG. 3A, reference character 4 a designates a mounting groove formounting the support member to the receiving element which will bedescribed hereinafter. Utilizing this groove 4 a, the support member canbe screwed to the receiving element.

Thus, in a state in which the plate-like elements 6, 6 have been foldedup, as shown in FIGS. 2A and 2B, a work Wb having an inside diameterportion can be mounted or removed. In addition, the plate-like elements6, 6 can be brought into opened states, as shown in FIGS. 3A and 3B, andthe work Wb can be supported at its inside diameter portion. It shouldbe noted that the length of the narrow section 9 can be slightly shorterthan the inside diameter L, so that the work Wb can be rotated to someextent from the supported state, whereby the supported (contact)position can be changed.

FIG. 4 shows the support member 20 in a state in which it has beensupported on the receiving element of a rotary unit 50 which will bedescribed hereinafter. Opposite ends of the support member 20 are placedon the receiving elements, and the support member 20 is screwed to thereceiving elements by utilizing the grooves 4 a.

III. Embodiment of Surface-treating Holder

FIGS. 5 and 6 show an embodiment of a surface-treating holder accordingto the present invention. The surface-treating holder designated by 30in FIGS. 5 and 6 is formed into a spring-like tubular structure, using awire 11 made of a stainless steel (SUS304) and having a diameter of 1.6mm by coiling the wire 11 in a counterclockwise direction withclearances being left, so that spiral-line faces 12, 12 are formed atopposite ends by coiling of the wire 11 at four turns. Between thespiral-line faces 12, 12, the wire 11 is coiled at distances of pitch of8.2 mm. A portion 12 a is formed at a center portion of the spiral-lineface 12 by close coiling of the wire 12.

In this embodiment, opposite ends of the spring-like tubular portion 13are portions 13 a formed by close coiling of the wire 11 at four turnswith no clearance left.

The wire 11 is coiled basically with clearances left and hence, asurface treatment such as vapor deposition of aluminum can be conductedthrough such clearances, and when the holders 30, 30 collide with eachother, the entanglement is prevented from occurring by the closelycoiled portions 12 a and 13 a.

In this embodiment, a spring 14 for preventing the entanglement isfurther wound around the wire 11 at the spring-like tubular structure13.

In the above embodiment, the relatively long tubular structure isformed, but as in a modification shown in FIG. 7, a short tubularstructure may be formed, and the wire may be coiled at proper turns toform a holder having any size and shape adapted to the shape of a work.This holder is designed, so that the works are accommodated in theholder and then surface-treated, while being rotated about their axiswithin a cage-like container

IV. Embodiment of Surface-treating Apparatus

FIGS. 8 to 10 show an embodiment of a surface-treating apparatus. Thesurface-treating apparatus shown is formed as aluminum vapor-depositingapparatus.

Referring to FIG. 8, a plurality of boats for an evaporation source 42,each of which is a melting and evaporating area for vapor-depositing analuminum material 41, are disposed on a boat support base 44 risen abovea support table 43 at a lower portion of a vacuum chamber 40 connectedto an evacuating system (not shown). An aluminum wire 45 which is amaterial to be vapor-deposited, is wound and retained around a feed reel46 below the support table 43, so that it is delivered continuously. Aleading end of the aluminum wire 45 is guided within a heat-resistantprotecting tube 47 facing toward an inner surface of the boat 42.Delivering gears 49, 49 are mounted in correspondence to a notch window48 provided in a portion of the protecting tube 47, so that the aluminumwire 45 can be supplied into the boat 42 by bringing the deliveringgears 49, 49 into direct contact with the aluminum wire 45 to deliverthe aluminum wire 45. The directions of the work about the rotationalaxis and about its axis are set, so that they are opposite from eachother, as shown by arrows in FIG. 8.

Two rotary units 50, 50 are disposed within the vacuum treating chamber40, and each constitute a means for rotating a work support member aboutits axis and about a rotating axis. The rotary units 50, 50 aresupported by rotary unit supports 50 b, 50 b provided on a rest 50 a, sothat they can be rotated in accordance with a driving force by rollers50 c mounted on the rotary unit supports 50 b.

Referring to FIG. 9, a driving disk unit 51 for rotating the work aboutthe rotating axis, which unit constitutes each of the rotary unit 50 andwhich is disposed on a left side, includes two disks 52 and 53 which aredisposed in an opposed relation with a narrow clearance lefttherebetween. A rotating sprocket chain 55 is mounted on the leftring-like disk 52 as viewed in FIG. 9 along an inner periphery of theleft ring-like disk 52 and meshed with a sprocket gear 54. Thus, therotary unit 50 is rotated about a rotational axis by transmitting therotation of the sprocket gear 54 connected to a driving motor 56.

Referring to FIGS. 9 and 10, a driving disk unit 61 disposed centrallyfor rotating the work about its axis, is constructed in such a mannerthat a ring-like disk 64 including a sprocket chain 63 is sandwichedbetween two disks 62, 62. A follower disk unit 71 disposed at a rightend of the rotary unit 50 is comprised of a single disk 72. The threedisk units 51, 61 and 71 are connected to one another by a rotary shaft80, so that the disk units 61 and 71 are rotated synchronously with therotating disk unit 51 with the driving of the rotating disk unit 51.

The ring-like disk 64 including the rotating sprocket chain 63 issupported and non-rotatably fixed by a fixing arm 65, so that it is notin association with the rotation of the disks 62, 62 sandwiching thedisk 64.

Receiving elements 82 rotatably through bearings 81 are mounted on eachof the left and right disk units 51 and 71. Receiving elements 82rotatable simultaneously through bearings 81 are also projectinglymounted on an outer surface of each of the left and right disks 62, 62of the central rotating disk unit 61. A sprocket gear 83 is mounted at acentral portion of each of shafts 66 interconnecting the receivingelements 82 and meshed with the rotating sprocket chain 63, so that eachreceiving element 82 is rotated about its axis with the rotation of thetwo disks 62, 62.

Thus, if the surface-treating support members are clamped between thereceiving elements 82, 82 and electric current is supplied to thedriving motor 56, the two disks 62, 62 of the rotating disk unit 61 andthe follower disk unit 71 are rotated with the rotation of the rotatingdisk unit 51, whereby the surface-treating support members are rotatedabout the rotational axis. In addition, the sprocket gears 83 meshedwith the rotating sprocket chain 63 are rotated by the rotation of twodisks 62, 62 of the rotating disk unit 61 and as a result, the receivingelements 82 are rotated, and the receiving elements 82 mounted on theleft and right disk units 51 and 71 are rotated freely and thus, thesupport members are rotated about their axes through thesurface-treating support members.

Both of the rotation of the support members about the rotational axisand the rotation of the support members about their axes are performedby the driving operation of the driving motor 56 and hence, only thedriving shaft 56 a of the driving motor 56 may be inserted through thevacuum treating chamber 40. Therefore, the degree of vacuum in thevacuum treating chamber is maintained at a high level, and theevacuating time can be shortened.

In the above embodiment, the rotary unit 50 has been constructed, sothat the support members can be rotated about the rotational axis androtated about its axis. Alternatively, the rotary unit 50 may beconstructed, so that the surface-treating support members are onlyrotated about the rotational axis, for example, by eliminating therotating sprocket chain 68 and the sprocket gears 83.

For example, if the rotating disk unit 51, the two disks 62, 62 of therotating disk unit 61 and the follower disk unit 71 are maintained inthe fixed states, so that only the ring-like disk 64 including thesprocket gears 83 is rotated, only the receiving elements 82 arerotated, so that the surface-treating support members can be rotatedonly about their axes.

V. Embodiment of Surface Treatment Using Surface-treating Support MemberComprised of Upper and Lower Openable and Closable Cages

The vapor deposition of aluminum was carried out using thesurface-treating support member comprised of the upper and loweropenable and closable cages in the above-described embodiment.

An Nd—Fe—B rare earth metal-based magnet as described in U.S. Pat. No.4,770,723 having a size of 30 mm×10 mm×50 mm was used as a work andsubjected to a vapor deposition of aluminum utilizing theabove-described vapor deposition apparatus. More specifically, thesupport members were set in the apparatus and then, the apparatus wasevacuated to 4×10⁻⁴ Torr. Further, argon (Ar) gas was introduced intothe apparatus, and an electric potential difference of −500 V wasapplied to the support members to clean the surface of the magnet for 20minutes. Then, in a state in which an electric potential difference of−100 V was applied to the support members, the works were subjected tothe vapor deposition of aluminum at a thickness of 10 μm for 25 minutes,wherein the boats were heated to evaporate aluminum. In this case, therotation of the works about the rotational axis was at 1.2 rpm, and therotation of the works about their axes was at 5 rpm. Under suchconditions, the vapor deposition of aluminum at a thickness of 10 μm wascarried out. As a result, aluminum was deposited uniformly on the workwith no peeling-off of an aluminum-deposited film on a product and withno chipping of the product.

VI. Embodiment of Surface-treating Support Member Comprised ofOpenably/Closably Foldable Plate-Like Elements

The vapor deposition of aluminum was carried out using thesurface-treating support member comprised of the openably/closablyfoldable plate-like elements in the above-described embodiment.

A ring-like Nd—Fe—B rare earth metal-based magnet as described in U.S.Pat. No. 4,770,723 having an outside diameter of 39.5 mm, an insidediameter of 22 mm and a thickness of 0.9 mm was used as a work andsubjected to a vapor deposition of aluminum at a thickness of 10 μm,utilizing the above-described vapor deposition apparatus under the sameconditions, except that the vapor-depositing time was set at 15 minutes.As a result, aluminum was deposited uniformly on the work with nopeeling-off of an aluminum-deposited film on a product and with nochipping of the product.

VII. Embodiment of Surface Treatment Using Surface-treating Holder

The vapor deposition of aluminum was carried out using the holder (40×60mm) in the above-described embodiment.

An Nd—Fe—B rare earth metal-based magnet as described in U.S. Pat. No.4,770,723 having a size of 30×10×50 mm was used as a work and subjectedto a vapor deposition of aluminum at a thickness of 10 μm utilizing thevapor deposition apparatus shown in FIG. 11 under the same condition asin the embodiment of the surface-treating support member comprised ofthe upper and lower cages, except that the cage-like container wasrotated at 1.2 rpm. As a result, aluminum was deposited uniformly on thework with no peeling-off of an aluminum-deposited film on a product andwith no chipping of the product.

COMPARATIVE EXAMPLE

The same work was used and immediately accommodated into the cage-likecontainer where it was subjected to the vapor deposition of aluminumwithout use of the holder according to the present invention as in theprior art. As a result, aluminum was deposited uniformly on the work,but scars were produced on the aluminum-deposited surface of a product;a chipping of the product was observed, resulting in a yield which was avalue as low as 65%.

What is claimed is:
 1. A process for surface-treating a plurality ofworks comprising the step of surface-treating the works in a treatingchamber, while rotating the works about their axes in spaced apartstates, wherein said rotation of the works is conducted with the workssupported by a support member rotated about its axis, said supportmember comprising an upper cage and a lower cage, including a pluralityof compartments, so that the cages are openable and closable in alengthwise direction.
 2. A process for surface-treating a plurality ofworks according to claim 1, wherein said surface treatment is a vapordeposition on a sintered article.
 3. A process for surface-treating aplurality of works, comprising the step of surface-treating the works ina treating chamber, while rotating them about a rotational axis inspaced-apart states, wherein said rotation of the works is carried outwith the works supported by a support member rotated about a rotationalaxis, the support member comprising an upper cage and a lower cageincluding a plurality of compartments, so that the cages are openableand closable in a lengthwise direction and so that each work can beaccommodated in a compartment in a manner where each work is spacedapart from one another.
 4. A process for surface-treating a plurality ofworks according to claim 3, wherein said surface treatment is a vapordeposition on a sintered article.
 5. A process for surface-treating aplurality of works, comprising the step of surface-treating the works ina treating chamber, while rotating them about their axes and about arotational axis in spaced-apart states, wherein said rotation of theworks about the rotational axis is carried out with the works supportedby a support member, the support member comprising an upper cage and alower cage including a plurality of compartments, so that the cages areopenable and closable in a lengthwise direction.
 6. A process forsurface-treating a plurality of works according to claim 5, wherein saidsurface treatment is a vapor deposition on a sintered article.